Nanometer deep shaping with Fluid Jet Polishing
Journal Article
(2002)
Author(s)
SM Booij (TU Delft - ImPhys/Optics)
H van Brug (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
OW Faehnle (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:bb6a77a4-efce-49aa-81fb-64c9bfa7fff8
More Info
expand_more
expand_more
Publication Year
2002
Research Group
ImPhys/Optics
Issue number
8
Volume number
41
Pages (from-to)
1926-1931
No files available
Metadata only record. There are no files for this record.