Neutron depth profiling on silicon wafers implanted with 1.55 MeV 3He ions through thin aluminium foils
Report
(2001)
Authors
F. Labohm (Old - Section Defects in Materials)
R Delamare (External organisation)
A van Veen (Old - Section Defects in Materials)
Research Group
Old - Section Defects in Materials
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https://resolver.tudelft.nl/bcbf530f-ed35-48c9-9947-e09c952965f9
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Publication Year
2001
Research Group
Old - Section Defects in Materials
Bibliographical Note
IRI-DM-2001-013@en
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