Neutron depth profiling on silicon wafers implanted with 1.55 MeV 3He ions through thin aluminium foils

Report (2001)

Authors

F. Labohm Old - Section Defects in Materials
R Delamare External organisation
A van Veen Old - Section Defects in Materials
Research Group
Old - Section Defects in Materials
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Published Date

2001

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials