Pick & Place of Waveguide Structures

Abstract

Classical computer have difficulties simulating specific complex problems, therefore other computation options are being explored. One of these options is the quantum computer, which is expected to excel in various industries. The challenge for the quantum computer is scaling it up to a high number of qubits. The diamond-based quantum computer is a suitable candidate for quantum computer, because it can be made scalable, with long coherence times, relatively high temperatures and low cross talk. Making such a scalable modular quantum computer using diamond qubits requires heterogeneous integration of optical components. Multiple integrations techniques for optical components exist, however in this thesis we are particularly interested in integrating a superconducting nanowire single photon detector (SNSPD) with pick & place onto the quantum chip to read out the photons emitted by diamond color-centers. The main goal of this thesis is to find out which integration scheme leads to the highest on-chip detection efficiency of a pick & place on waveguide integrated SNSPD.

In this work we designed a silicon nitride structure with low loss tapered support structures. Next different releasing methods are introduced to release the fabricated silicon nitride structure independent of the material stack and with a high yield. Lastly, we show how waveguide structures can be pick & placed on receptor chips that underwent surface treatment.