CMOS compatible pressure sensors: a comparison between SiC and SiN

Pakula, L.S.; Yang, H; French, P. J.; Sarro, Pasqualina Maria

CMOS compatible pressure sensors: a comparison between SiC and SiN

Conference paper (2004)

Authors

L.S. Pakula Electronic Instrumentation

H Yang Electronic Instrumentation

P. J. French Electronic Instrumentation

Pasqualina Maria Sarro Electronic Components, Technology and Materials

Research Group

Electronic Instrumentation

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Published Date

2004

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Research Group

Electronic Instrumentation

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