CMOS compatible pressure sensors: a comparison between SiC and SiN
Conference Paper
(2004)
Author(s)
L.S. Pakula (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
Paddy French (TU Delft - Electronic Instrumentation)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:bdf98e4d-6462-47d7-9cef-99391c2b9226
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Publication Year
2004
Research Group
Electronic Instrumentation
Pages (from-to)
769-773
ISBN (print)
90-73461-43-X
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