Fabrication of nanofluidic devices in glass with polysilicon electrodes
Journal Article
(2005)
Author(s)
VG Kutchoukov (TU Delft - Electronic Instrumentation)
L.S. Pakula (TU Delft - Electronic Instrumentation)
GOF Parikesit (TU Delft - ImPhys/Quantitative Imaging)
Y. Garini (TU Delft - ImPhys/Quantitative Imaging)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Andre Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/doi:10.1016/j.sna.2005.02.030
To reference this document use:
https://resolver.tudelft.nl/uuid:be59a14b-f32e-4587-a273-a3ee32551713
More Info
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Publication Year
2005
Research Group
Electronic Instrumentation
Volume number
123-124
Pages (from-to)
602-607
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