Electrical characterization of silicon diodes formed by laser annealing of implanted dopants

Nanver, L. K.; Slabbekoorn, JHCM; Burtsev, A; Scholtes, T.L.M.; Surdeanu, R; Simonetti, F; Kalhert, HJ; Slotboom, JW

Electrical characterization of silicon diodes formed by laser annealing of implanted dopants

Conference paper (2003)

Authors

L. K. Nanver Electronic Components, Technology and Materials

JHCM Slabbekoorn Electronic Components, Technology and Materials

A Burtsev Electronic Components, Technology and Materials

T.L.M. Scholtes Electronic Components, Technology and Materials

R Surdeanu External organisation

F Simonetti External organisation

HJ Kalhert External organisation

JW Slotboom Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek

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Published Date

2003

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Research Group

Electronic Components, Technology and Materials

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