Electrical characterization of silicon diodes formed by laser annealing of implanted dopants

Conference Paper (2003)

Author(s)

L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)

JHCM Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)

A Burtsev (TU Delft - Electronic Components, Technology and Materials)

T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)

R Surdeanu (External organisation)

F Simonetti (External organisation)

HJ Kalhert (External organisation)

JW Slotboom (TU Delft - Electronic Components, Technology and Materials)

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek Conf.proc. > 3 pag

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Publication Year

2003

Research Group

Electronic Components, Technology and Materials

Pages (from-to)

119-130

ISBN (print)

1-56677-396-2

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