Electrical characterization of silicon diodes formed by laser annealing of implanted dopants

Conference paper (2003)

Authors

L.K. Nanver Electronic Components, Technology and Materials - EEMCS
JHCM Slabbekoorn Electronic Components, Technology and Materials - EEMCS
A Burtsev Electronic Components, Technology and Materials - EEMCS
T.L.M. Scholtes Electronic Components, Technology and Materials - EEMCS
R Surdeanu External organisation
F Simonetti External organisation
HJ Kalhert External organisation
JW Slotboom Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Elektrotechniek Techniek
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Published Date

2003

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials