Reliability of micromechanical thin-film resonators
Doctoral Thesis
(2002)
Author(s)
R Kazinczi (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:be72d7dd-3f37-41d5-acfc-274870129f0e
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Publication Year
2002
Research Group
Electronic Instrumentation
ISBN (print)
90-5166-891-0
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