19 records found
1
Reliability of micromechanical thin-film resonators
Adsorption-induced failure modes of thin-film resonators
Design of low-cost resonant mode sensors
Environment-induced failure modes of thin film resensors
Inexpensive mems packaging
3- D resonator bridges as sensing elements
Reliability issues on MEMS resonators
FEM study on the dependence of resonant frequency shift on mechanical stress of thin film resonator
Long-term stability of SiC resonators
Anisotropic etching of silicon using a galvanic cell
New failure mechanism in silicon nitride resonators
Versatile tool for characterising long-term stability and reliabity of micromechanical structures
Galvanic etching for sensor fabrication
Down-scale problems of resonant SiC devices
Environment induced failure modes of thin film resonators
Reliability of silicon nitride as structural material in MEMS
Versatile tool for characterising long term stability and reliability of micromechanical structures
Mechanical aspects of reliability of micromechanical structures
