19 records found
1
Design of low-cost resonant mode sensors
Reliability of micromechanical thin-film resonators
Adsorption-induced failure modes of thin-film resonators
Environment-induced failure modes of thin film resensors
FEM study on the dependence of resonant frequency shift on mechanical stress of thin film resonator
Inexpensive mems packaging
Reliability issues on MEMS resonators
3- D resonator bridges as sensing elements
New failure mechanism in silicon nitride resonators
Versatile tool for characterising long-term stability and reliabity of micromechanical structures
Long-term stability of SiC resonators
Anisotropic etching of silicon using a galvanic cell
Galvanic etching for sensor fabrication
Environment induced failure modes of thin film resonators
Down-scale problems of resonant SiC devices
Reliability of silicon nitride as structural material in MEMS
Mechanical aspects of reliability of micromechanical structures
Versatile tool for characterising long term stability and reliability of micromechanical structures
