R

R Kazinczi

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19 records found

Reliability of micromechanical thin-film resonators
Doctoral thesis - R Kazinczi

Design of low-cost resonant mode sensors

Anisotropic etching of silicon using a galvanic cell

3- D resonator bridges as sensing elements
Conference paper - R Kazinczi, J.R. Mollinger, A. Bossche

Environment induced failure modes of thin film resonators
Conference paper - R Kazinczi, J.R. Mollinger, A. Bossche

Mechanical aspects of reliability of micromechanical structures
Conference paper - R Kazinczi, J.R. Mollinger, A. Bossche

Adsorption-induced failure modes of thin-film resonators
Conference paper - R Kazinczi, J.R. Mollinger, A. Bossche

Long-term stability of SiC resonators
Conference paper - R Kazinczi, J.R. Mollinger, A. Bossche

Galvanic etching for sensor fabrication

Down-scale problems of resonant SiC devices
Conference paper - R Kazinczi, J.R. Mollinger, A. Bossche

Environment-induced failure modes of thin film resensors
Journal article - R Kazinczi, J.R. Mollinger, A. Bossche

Reliability issues on MEMS resonators

FEM study on the dependence of resonant frequency shift on mechanical stress of thin film resonator

Versatile tool for characterising long-term stability and reliabity of micromechanical structures
Journal article - R Kazinczi, J.R. Mollinger, A. Bossche

Inexpensive mems packaging
Conference paper - R Kazinczi, J.R. Mollinger, A. Bossche

Reliability of silicon nitride as structural material in MEMS
Conference paper - R Kazinczi, J.R. Mollinger, A. Bossche

Design of low-cost resonant mode sensors

New failure mechanism in silicon nitride resonators
Conference paper - R Kazinczi, J.R. Mollinger, A. Bossche

Versatile tool for characterising long term stability and reliability of micromechanical structures
Conference paper - R Kazinczi, J.R. Mollinger, A. Bossche