Versatile tool for characterising long-term stability and reliabity of micromechanical structures
Journal Article
(2000)
Author(s)
R Kazinczi (TU Delft - Electronic Instrumentation)
J.R. Mollinger (TU Delft - Electronic Instrumentation)
Andre Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:31e23fca-af48-46ac-a795-fe504bf11dc9
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Publication Year
2000
Research Group
Electronic Instrumentation
Issue number
1-3
Volume number
85
Pages (from-to)
84-89
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