FEM study on the dependence of resonant frequency shift on mechanical stress of thin film resonator

Conference paper (2001)

Authors

SS Lee Electronic Instrumentation - EEMCS
R Kazinczi Electronic Instrumentation - EEMCS
J.R. Mollinger Electronic Instrumentation - EEMCS
MJ Vellekoop Electronic Instrumentation - EEMCS
A. Bossche Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
More Info
expand_more

Published Date

2001

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation