Reliability issues on MEMS resonators

Report (2001)
Author(s)

R Kazinczi (TU Delft - Electronic Instrumentation)

J.R. Mollinger (TU Delft - Electronic Instrumentation)

Andre Bossche (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2001
Research Group
Electronic Instrumentation
Bibliographical Note
DEL.3780@en

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