Versatile tool for characterising long term stability and reliability of micromechanical structures
Conference Paper
(1999)
Author(s)
R Kazinczi (TU Delft - Electronic Instrumentation)
J.R. Mollinger (TU Delft - Electronic Instrumentation)
Andre Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:38c40ec6-01be-4eb3-b95d-f7e340434b00
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Publication Year
1999
Research Group
Electronic Instrumentation
Pages (from-to)
1-5
ISBN (print)
90-76699-02-X
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