Inexpensive mems packaging
Conference Paper
(2001)
Author(s)
R Kazinczi (TU Delft - Electronic Instrumentation)
J.R. Mollinger (TU Delft - Electronic Instrumentation)
Andre Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:65f5da5f-931f-467e-8558-00ea4d4c8ebf
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Publication Year
2001
Research Group
Electronic Instrumentation
Pages (from-to)
59-64
ISBN (print)
0-7923-7012-0
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