19 records found
1
Design of low-cost resonant mode sensors
Reliability of micromechanical thin-film resonators
Environment-induced failure modes of thin film resensors
Adsorption-induced failure modes of thin-film resonators
Inexpensive mems packaging
3- D resonator bridges as sensing elements
Reliability issues on MEMS resonators
FEM study on the dependence of resonant frequency shift on mechanical stress of thin film resonator
Environment induced failure modes of thin film resonators
Galvanic etching for sensor fabrication
Versatile tool for characterising long-term stability and reliabity of micromechanical structures
Long-term stability of SiC resonators
Down-scale problems of resonant SiC devices
New failure mechanism in silicon nitride resonators
Anisotropic etching of silicon using a galvanic cell
Reliability of silicon nitride as structural material in MEMS
Versatile tool for characterising long term stability and reliability of micromechanical structures
Mechanical aspects of reliability of micromechanical structures
