New failure mechanism in silicon nitride resonators
Conference Paper
(2000)
Author(s)
R Kazinczi (TU Delft - Electronic Instrumentation)
J.R. Mollinger (TU Delft - Electronic Instrumentation)
Andre Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:49a72e74-41ec-4d82-9731-6d48976c6697
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Publication Year
2000
Research Group
Electronic Instrumentation
Pages (from-to)
229-234
ISBN (print)
0-7803-5273-4
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