New failure mechanism in silicon nitride resonators

Conference paper (2000)

Authors

R Kazinczi Electronic Instrumentation - EEMCS
J.R. Mollinger Electronic Instrumentation - EEMCS
A. Bossche Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2000

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation