Anisotropic etching of silicon using a galvanic cell

French, Patrick J.; Ashruf, CMA; Sarro, P. M.; Kazinczi, R; Xia, XH; Kelly, JJ

Anisotropic etching of silicon using a galvanic cell

Conference paper (2000)

Authors

Patrick J. French Electronic Instrumentation

CMA Ashruf Electronic Instrumentation

P. M. Sarro Electronic Components, Technology and Materials

R Kazinczi Electronic Instrumentation

XH Xia External organisation

JJ Kelly External organisation

Research Group

Electronic Instrumentation

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Published Date

2000

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Research Group

Electronic Instrumentation

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