Anisotropic etching of silicon using a galvanic cell
Conference Paper
(2000)
Author(s)
Paddy J. French (TU Delft - Electronic Instrumentation)
Colin Ashruf (TU Delft - Electronic Instrumentation)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
R Kazinczi (TU Delft - Electronic Instrumentation)
XH Xia (External organisation)
JJ Kelly (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:1023d152-d9bd-4e0a-b206-9cab441b1953
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Publication Year
2000
Research Group
Electronic Instrumentation
Pages (from-to)
1-8
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