Reliability of silicon nitride as structural material in MEMS
Conference Paper
(1999)
Author(s)
R Kazinczi (TU Delft - Electronic Instrumentation)
J.R. Mollinger (TU Delft - Electronic Instrumentation)
Andre Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:fbcdb1bd-ac9b-4fc5-bbfc-4345241363c2
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Publication Year
1999
Research Group
Electronic Instrumentation
Pages (from-to)
174-183
ISBN (print)
0-8194-3472-8
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