Sheet resistance measurement for process monitoring of 400 °c PureB deposition on Si
Conference Paper
(2015)
Author(s)
L Qi (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/ICMTS.2015.7106135
To reference this document use:
https://resolver.tudelft.nl/uuid:c06e4d59-3931-4934-9495-b11934a2181e
More Info
expand_more
expand_more
Publication Year
2015
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
169-174
ISBN (print)
978-1-4799-8302-5
No files available
Metadata only record. There are no files for this record.