Fabrication of tunable clamped-clamped microresonators in silicon
Journal Article
(2011)
Author(s)
R. van Leeuwen (External organisation)
PHR Lew (TU Delft - QN/Kavli Nanolab Delft)
Emile van der Drift (TU Delft - QN/Kavli Nanolab Delft)
H. S J van der Zant (TU Delft - QN/Mol. Electronics & Devices)
WJ Venstra (TU Delft - QN/Mol. Electronics & Devices)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:c2cfc893-83f1-4632-a059-5b107009a425
More Info
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Publication Year
2011
Language
English
Research Group
QN/Kavli Nanolab Delft
Issue number
7
Volume number
21
Pages (from-to)
75011-1-75011-5
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