Ultrahigh resolution focused electron beam induces processing: the effect of substrate thickness

Journal article (2011)

Authors

W.F. van Dorp ImPhys/Charged Particle Optics
I. Lazic ImPhys/Charged Particle Optics
A Beyer External organisation
A Golzhauser External organisation
JB Wagner External organisation
TW Hansen External organisation
C.W. Hagen ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2011

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics