Spray coating of AZ4562 photoresist for MEMS applications
Conference Paper
(2001)
Author(s)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:c458835f-fd86-4beb-b426-c6c75780174c
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
154-158
ISBN (print)
90-73461-28-6
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