Roughness treatment of silicon surface after Deep Reactive Ion Etching
Conference Paper
(2007)
Author(s)
TMH Pham (TU Delft - Electronic Components, Technology and Materials)
C.R. De Boer (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:c58194dc-0b29-4c19-8865-2f1036276abb
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
535-538
ISBN (print)
978-90-73461-49-9
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