Influence of ICP etching on surface morphology of InP substrates
Conference Paper
(2004)
Author(s)
F Karouta (External organisation)
EJ Geluk (External organisation)
RW van der Heijden (External organisation)
AYu Silov (External organisation)
T Eijkermans (External organisation)
JJGM van der Tol (External organisation)
MK Smit (External organisation)
Huub Salemink (TU Delft - QN/Afdelingsbureau)
Research Group
QN/Afdelingsbureau
To reference this document use:
https://resolver.tudelft.nl/uuid:c639f70f-834d-423e-9b99-107d629bb2fb
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Publication Year
2004
Research Group
QN/Afdelingsbureau
Bibliographical Note
nog niet eerder opgevoerd@en
Pages (from-to)
322-325
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