Engineering and tuning GHz SAWs in suspended SiN membranes

None, None

Engineering and tuning GHz SAWs in suspended SiN membranes

Master Thesis (2024)

Author(s)

A. Soltész (TU Delft - Mechanical Engineering)

Contributor(s)

G.J. Verbiest – Mentor (TU Delft - Dynamics of Micro and Nano Systems)

R.A. Norte – Graduation committee member (TU Delft - Dynamics of Micro and Nano Systems)

Faculty

Mechanical Engineering

To reference this document use:

https://resolver.tudelft.nl/uuid:c6470320-2f74-420b-a8d2-c3deaf962a58

More Info

expand_more

Publication Year

2024

Language

English

Graduation Date

19-06-2024

Awarding Institution

Delft University of Technology

Programme

Mechanical Engineering, Precision and Microsystems Engineering

Faculty

Mechanical Engineering

Downloads counter

87

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Files

Master_thesis_andras_soltesz.p... (pdf)

(pdf | 0 Mb)

License info not available

File under embargo until 19-06-2026