Engineering and tuning GHz SAWs in suspended SiN membranes

Master Thesis (2024)
Author(s)

A. Soltész (TU Delft - Mechanical Engineering)

Contributor(s)

Gerard Verbiest – Mentor (TU Delft - Dynamics of Micro and Nano Systems)

R.A. Norte – Graduation committee member (TU Delft - Dynamics of Micro and Nano Systems)

Faculty
Mechanical Engineering
More Info
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Publication Year
2024
Language
English
Graduation Date
19-06-2024
Awarding Institution
Delft University of Technology
Programme
['Mechanical Engineering | Precision and Microsystems Engineering']
Faculty
Mechanical Engineering
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File under embargo until 19-06-2026