Engineering and tuning GHz SAWs in suspended SiN membranes
Master Thesis
(2024)
Author(s)
A. Soltész (TU Delft - Mechanical Engineering)
Contributor(s)
G.J. Verbiest – Mentor (TU Delft - Mechanical Engineering)
R.A. Norte – Graduation committee member (TU Delft - Mechanical Engineering)
Faculty
Mechanical Engineering
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Publication Year
2024
Language
English
Graduation Date
19-06-2024
Awarding Institution
Delft University of Technology
Programme
Mechanical Engineering, Precision and Microsystems Engineering
Faculty
Mechanical Engineering
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