Modal analysis for density and anisotropic elasticity identification of adsorbates on microcantilevers

Journal Article (2018)
Author(s)

Pierpaolo Belardinelli (TU Delft - Dynamics of Micro and Nano Systems)

L. M.F.R. Hauzer (Student TU Delft)

M. Siskins (TU Delft - QN/Steeneken Lab, Kavli institute of nanoscience Delft)

Murali K. Krishna Ghatkesar (TU Delft - Micro and Nano Engineering)

Farbod Alijani (TU Delft - Dynamics of Micro and Nano Systems)

Research Group
Dynamics of Micro and Nano Systems
Copyright
© 2018 P. Belardinelli, L. M.F.R. Hauzer, M. Siskins, M.K. Ghatkesar, F. Alijani
DOI related publication
https://doi.org/10.1063/1.5047279
More Info
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Publication Year
2018
Language
English
Copyright
© 2018 P. Belardinelli, L. M.F.R. Hauzer, M. Siskins, M.K. Ghatkesar, F. Alijani
Research Group
Dynamics of Micro and Nano Systems
Issue number
14
Volume number
113
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Abstract

Physical characteristics such as mass and stiffness of biological objects are emerging as new markers for severe diseases. Micromechanical resonators can be used to quantify multiple of these characteristics simultaneously. In this paper, we propose a methodology that utilizes higher flexural modes of vibration to perform simultaneous characterization of the density and elastic modulus of adsorbates. To demonstrate this concept, a polymeric block with a known dimension and anisotropy is written directly on the cantilever surface using a two-photon polymerization technique and characterised by modal analysis. Our method captures the effective bending stress exerted by non-isotropic materials which is masked in the atomic force microscopy indentation technique.

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