The influence of ion beam parameters on pattern resolution

Journal article (1996)

Authors

PWH Jager ImPhys/Charged Particle Optics
C.W. Hagen ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

1996

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics