The influence of ion beam parameters on pattern resolution
Journal Article
(1996)
Author(s)
PWH Jager (TU Delft - ImPhys/Charged Particle Optics)
Cornelis W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:c7465822-4202-4515-acca-e631ef19a30a
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Publication Year
1996
Research Group
ImPhys/Charged Particle Optics
Volume number
30
Pages (from-to)
353-356
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