6 records found
1
SCALPEL feasibility study.
Influence of Coulomb Interactions on current density distribution in a two-lens focused ion beam system
Design of the "Fancier": an instrument for fabrication and analysis of nanostructures combining ion and electron regulation
Optical design of a combined ion and electron beam system for nanotechnology
A combined objective lens for electrons and ions
The influence of ion beam parameters on pattern resolution
