Cathode Ray tube type electron gun as a source for multibeam electron lithography

Journal article (2007)

Authors

AJ van den Brom External organisation
AHV van Veen, External organisation
WM Weeda External organisation
GZM Berglund External organisation
M.J.J. Wieland External organisation
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2007

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics