Cathode Ray tube type electron gun as a source for multibeam electron lithography

Journal Article (2007)
Author(s)

AJ van den Brom (External organisation)

AHV van Veen, (External organisation)

WM Weeda (External organisation)

GZM Berglund (External organisation)

M.J.J. Wieland (External organisation)

P Kruit (TU Delft - ImPhys/Charged Particle Optics)

Research Group
ImPhys/Charged Particle Optics
More Info
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Publication Year
2007
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
25
Pages (from-to)
2245-2249

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