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M.J.J. Wieland
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3 records found
Predicted effect of shot noise on contact hole dimension in e-beam lithography
Journal article -
P. Kruit
,
S. Steenbrink
,
M.J.J. Wieland
Cathode Ray tube type electron gun as a source for multibeam electron lithography
Journal article -
AJ van den Brom
,
AHV van Veen,
,
WM Weeda
,
GZM Berglund
,
M.J.J. Wieland
,
P. Kruit
MAPPER: high throughput maskless lithography
Journal article -
E Slot
,
M.J.J. Wieland
,
G. de Boer
,
P. Kruit
,
GF ten Berge