Predicted effect of shot noise on contact hole dimension in e-beam lithography
Journal Article
(2006)
Author(s)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
S. Steenbrink (External organisation)
M.J.J. Wieland (External organisation)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:d503793c-9230-4104-82e2-ebc4c14a9db4
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Publication Year
2006
Research Group
ImPhys/Charged Particle Optics
Issue number
Nov/Dec
Volume number
B 24
Pages (from-to)
2931-2935
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