Predicted effect of shot noise on contact hole dimension in e-beam lithography

Journal article (2006)

Authors

P. Kruit ImPhys/Charged Particle Optics
S. Steenbrink External organisation
M.J.J. Wieland External organisation
Research Group
ImPhys/Charged Particle Optics
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Published Date

2006

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics