3D SiC CMOS compatible surface micromachined accelerometer
Conference Paper
(2008)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
Paddy French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:c9b0bdfa-3a7a-4838-abf0-bd9dfa9faa89
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
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