Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates
Conference Paper
(2013)
Author(s)
B. Morana (TU Delft - Electronic Components, Technology and Materials)
Giuseppe Fiorentino (TU Delft - Electronic Components, Technology and Materials)
Gregory Pandraud (TU Delft - Electronic Components, Technology and Materials)
JF Creemer (TU Delft - Electronic Components, Technology and Materials)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/MEMSYS.2013.6474284
To reference this document use:
https://resolver.tudelft.nl/uuid:c9b98795-1f06-4e15-880d-f63406779eea
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Components, Technology and Materials
Bibliographical Note
Harvest@en
Pages (from-to)
484-487
ISBN (print)
978-146735655-8
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