The kinetics of tungsten deposition from a H2/WF6 mixture studied by in situ laser Raman scattering
Conference Paper
(1996)
Author(s)
TGM Oosterlaken (External organisation)
GJ Leusink (External organisation)
GCAM Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
OLD Metals Processing, Microstructures and Properties
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Publication Year
1996
Language
English
Research Group
OLD Metals Processing, Microstructures and Properties
Volume number
96
Pages (from-to)
808-813
ISBN (print)
9781566771559
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