Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

L Mele (TU Delft - Electronic Components, Technology and Materials)

T Rossi (External organisation)

M Riccio (External organisation)

E Iervolino (TU Delft - Old - EWI Sect. ECTM)

F Santagata (TU Delft - Electronic Components, Technology and Materials)

A Irace (External organisation)

G Breglio (External organisation)

JF Creemer (TU Delft - Electronic Components, Technology and Materials)

PM Sarro (TU Delft - Electronic Components, Technology and Materials)