Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

L. Mele (TU Delft - Electronic Components, Technology and Materials)

T Rossi (External organisation)

Michele Riccio (External organisation)

E Iervolino (TU Delft - Old - EWI Sect. ECTM)

F. Santagata (TU Delft - Electronic Components, Technology and Materials)

Andrea Irace (External organisation)

G Breglio (External organisation)

JF Creemer (TU Delft - Electronic Components, Technology and Materials)

Lina Sarro (TU Delft - Electronic Components, Technology and Materials)