Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Conference Paper (2011)

Author(s)

L Mele (TU Delft - Electrical Engineering, Mathematics and Computer Science)

T Rossi (External organisation)

M Riccio (External organisation)

E Iervolino (TU Delft - Old - EWI Sect. ECTM)

F Santagata (TU Delft - Electrical Engineering, Mathematics and Computer Science)

A Irace (External organisation)

G Breglio (External organisation)

JF Creemer (TU Delft - Electrical Engineering, Mathematics and Computer Science)

PM Sarro (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Research Group

Electronic Components, Technology and Materials

Conf.proc. > 3 pag Conference contrib. refereed

DOI related publication

https://doi.org/10.1016/j.proeng.2011.12.096 Final published version

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Publication Year

2011

Language

English

Research Group

Electronic Components, Technology and Materials

Pages (from-to)

387-390

Publisher

Elsevier

Event

Eurosensors XXV (2011-09-04 - 2011-09-07), Athens, Greece

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