A tube-shaped buried Pirani gauge for low detection limit with small footprint
Journal Article
(2011)
Author(s)
Fabio Santagata (TU Delft - Electronic Components, Technology and Materials)
J.F. Creemer (TU Delft - Electronic Components, Technology and Materials)
Elina Iervolino (TU Delft - Old - EWI Sect. ECTM)
L. Mele (TU Delft - Electronic Components, Technology and Materials)
AW van Herwaarden (External organisation)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/JMEMS.2011.2127457
To reference this document use:
https://resolver.tudelft.nl/uuid:cad1eab6-7476-4428-be12-16daf2069e00
More Info
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
3
Volume number
20
Pages (from-to)
676-684
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