A tube-shaped buried Pirani gauge for low detection limit with small footprint

Journal article (2011)

Authors

F. Santagata Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

E. Iervolino Old - EWI Sect. ECTM

L. Mele Electronic Components, Technology and Materials -

AW van Herwaarden External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

To reference this document use:

http://resolver.tudelft.nl/uuid:cad1eab6-7476-4428-be12-16daf2069e00

More Info

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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials