Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing
Journal Article
(2014)
Author(s)
S Hari (TU Delft - ImPhys/Charged Particle Optics)
C. W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
T Verduin (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:cb3030b0-b7f0-4d0d-bc14-d88f16c8c458
More Info
expand_more
expand_more
Publication Year
2014
Language
English
Research Group
ImPhys/Charged Particle Optics
Bibliographical Note
033002@en
Issue number
3
Volume number
13
Pages (from-to)
1-7
No files available
Metadata only record. There are no files for this record.