Experimental evaluation of reset control for improved stage performance
M. F. Heertjes (Eindhoven University of Technology, ASML)
K. G J Gruntjens (Océ Technologies B.V)
S. J L M van Loon (Eindhoven University of Technology)
N. van de Wouw (University of Minnesota Twin Cities, TU Delft - Team Bart De Schutter, Eindhoven University of Technology)
W. P M H Heemels (Eindhoven University of Technology)
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Abstract
A reset integral controller is discussed that induces improved low-frequency disturbance rejection properties under double integrator control without giving the unwanted increase of overshoot otherwise resulting from adding an extra linear integrator. To guarantee closed-loop stability, a (conditional) reset condition is used that restricts the input-output behavior of the dynamic reset element to a [0,α]-sector with α a positive (finite) gain. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked through (measured) frequency response data. Both stability and performance of the control design will be discussed via measurement results obtained from a wafer stage system of an industrial wafer scanner.