Nanometer-Scale Height Measurements in Micromachined Picoliter Vials based on Interference Fringe Analysis.
Conference Paper
(2000)
Author(s)
LR van den Doel (TU Delft - ImPhys/Quantitative Imaging)
LJ van Vliet (TU Delft - ImPhys/Quantitative Imaging)
KT Hjelt (TU Delft - ImPhys/Quantitative Imaging)
MJ Vellekoop (TU Delft - Electronic Instrumentation)
F Gromball (External organisation)
JG Korvink (External organisation)
I.T. Young (TU Delft - ImPhys/Quantitative Imaging)
Research Group
ImPhys/Quantitative Imaging
To reference this document use:
https://resolver.tudelft.nl/uuid:ccd02e3d-8f06-4a21-82e8-e01ded0addd9
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Publication Year
2000
Research Group
ImPhys/Quantitative Imaging
Bibliographical Note
ISSN: 1051-4651@en
Pages (from-to)
57-62
ISBN (print)
0-7695-0750-6
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