Modeling of selective tungsten LPCVD
Journal Article
(1996)
Author(s)
KJ Kuijlaars (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
C. R. Kleijn (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Harry EA van den Akker (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Research Group
Old - sect Kramers Laboratory (MSP/FT)
To reference this document use:
https://resolver.tudelft.nl/uuid:ced7759c-e4d6-4c7d-a434-04fc3b980914
More Info
expand_more
expand_more
Publication Year
1996
Research Group
Old - sect Kramers Laboratory (MSP/FT)
Volume number
290/291
Pages (from-to)
406-410
No files available
Metadata only record. There are no files for this record.