W and WSi2 deposition by the reaction of poly-cristalline Si and WF6
Conference Paper
(1998)
Author(s)
C Schaffnit (External organisation)
E Sabouret (External organisation)
CA van de Jeugd (External organisation)
TGM Oosterflaken (External organisation)
GCAM Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
OLD Metals Processing, Microstructures and Properties
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https://resolver.tudelft.nl/uuid:cf5ffcaa-58d9-408e-a09b-595fcf5769b6
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Publication Year
1998
Research Group
OLD Metals Processing, Microstructures and Properties
Pages (from-to)
47-55
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