W and WSi2 deposition by the reaction of poly-cristalline Si and WF6

Conference paper (1998)

Authors

C Schaffnit External organisation
E Sabouret External organisation
CA van de Jeugd External organisation
TGM Oosterflaken External organisation
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
S Radelaar OLD Metals Processing, Microstructures and Properties
Research Group
OLD Metals Processing, Microstructures and Properties
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Published Date

1998

Language

Undefined/Unknown

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Research Group

OLD Metals Processing, Microstructures and Properties