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ES

E Sabouret

4 records found

1

Authored

W and WSi2 deposition by the reaction of poly-cristalline Si and WF6

Conference paper (1998) - C Schaffnit, E Sabouret, CA van de Jeugd, TGM Oosterflaken, G.C.A.M. Janssen, S Radelaar

Final Report on the materials properties of W and WSI2 produced with the WF6/Poly-Si Displacement reaction

Report (1997) - C Schaffnit, E Sabouret, CA van de Jeugd, TGM Oosterlaken, G.C.A.M. Janssen, S Radelaar

Reactive Ion Etchin of metal stack consisting of an aluminium ally, WGe barrier and Ti adhesion layer

Journal article (1997) - E Sabouret, C Schaffnit, JF Jongste, G.C.A.M. Janssen, S Radelaar

Report on etching of a stack consisting of an aluminum alloy, WGe barrier and Ti adhesion layer. Anisotropy, selectivity to oxide and quality of the adhesion.

Report (1996) - E Sabouret, PFM Verhoeven, JF Jongste, G.C.A.M. Janssen, S Radelaar