E Sabouret

Conference paper (1)

Journal article (1)

Report (2)

4 records found

W and WSi2 deposition by the reaction of poly-cristalline Si and WF6

Conference paper (1998) - C Schaffnit (author) , E Sabouret (author) , CA van de Jeugd (author) , TGM Oosterflaken (author) , G.C.A.M. Janssen (author) , S Radelaar (author)

Final Report on the materials properties of W and WSI2 produced with the WF6/Poly-Si Displacement reaction

Report (1997) - C Schaffnit (author) , E Sabouret (author) , CA van de Jeugd (author) , TGM Oosterlaken (author) , G.C.A.M. Janssen (author) , S Radelaar (author)

Reactive Ion Etchin of metal stack consisting of an aluminium ally, WGe barrier and Ti adhesion layer

Journal article (1997) - E Sabouret (author) , C Schaffnit (author) , JF Jongste (author) , GCAM Janssen (author) , S Radelaar (author)

Report on etching of a stack consisting of an aluminum alloy, WGe barrier and Ti adhesion layer. Anisotropy, selectivity to oxide and quality of the adhesion.

Report (1996) - E Sabouret (author) , PFM Verhoeven (author) , JF Jongste (author) , GCAM Janssen (author) , S Radelaar (author)