Report on etching of a stack consisting of an aluminum alloy, WGe barrier and Ti adhesion layer. Anisotropy, selectivity to oxide and quality of the adhesion.
Report
(1996)
Author(s)
E Sabouret (External organisation)
PFM Verhoeven (External organisation)
JF Jongste (External organisation)
GCAM Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
OLD Metals Processing, Microstructures and Properties
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https://resolver.tudelft.nl/uuid:e6f90ada-302a-4bf8-9b01-324e4bf84def
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Publication Year
1996
Language
English
Research Group
OLD Metals Processing, Microstructures and Properties
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