Galvanic etching of silicon for fabrication of micromechanical structures

Doctoral Thesis (2000)

Author(s)

CMA Ashruf (TU Delft - Electronic Instrumentation)

Contributor(s)

JJ Kelly – Copromotor

S Middelhoek – Copromotor

Research Group

Electronic Instrumentation

Diss. prom. aan TU Delft

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Publication Year

2000

Research Group

Electronic Instrumentation

ISBN (print)

90-407-2001-0

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