Stress and stress gradients in magnetron sputtered TiN layers.
Conference Paper
(1998)
Author(s)
J-D Kamminga (TU Delft - OLD Metals Processing, Microstructures and Properties)
R Delhez (TU Delft - OLD Virtual Materials and Mechanics)
Th.H de Keijser (External organisation)
EJ Mittemeijer (TU Delft - OLD Virtual Materials and Mechanics)
Research Group
OLD Metals Processing, Microstructures and Properties
To reference this document use:
https://resolver.tudelft.nl/uuid:d08ee2ff-9240-468a-bb16-ac5089307aee
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Publication Year
1998
Research Group
OLD Metals Processing, Microstructures and Properties
Pages (from-to)
868-873
ISBN (print)
9172192119
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