Design, Fabrication and Testing of an Opto-Mechanical Ultrasound Sensor Based on a Sensitive Silicon Photonic Waveguide

Westerveld, W.J.; Mahmud-Ul-Hasan,  Md.; Rottenberg, Xavier; Severi,  Simone; Rochus, Veronique

Design, Fabrication and Testing of an Opto-Mechanical Ultrasound Sensor Based on a Sensitive Silicon Photonic Waveguide

Abstract (2019)

Authors

W.J. Westerveld IMEC

Md. Mahmud-Ul-Hasan

Xavier Rottenberg

Simone Severi

Veronique Rochus

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Published Date

2019

Language

English

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