Development of a Large-Format X-Ray Microcalorimeter Array Based on a Ti/Au Transition-Edge Sensor

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Development of a Large-Format X-Ray Microcalorimeter Array Based on a Ti/Au Transition-Edge Sensor

Journal Article (2026)

Author(s)

Kenichiro Nagayoshi (SRON–Netherlands Institute for Space Research)

Martin de Wit (TU Delft - Applied Sciences, SRON–Netherlands Institute for Space Research)

Luciano Gottardi (SRON–Netherlands Institute for Space Research)

Emanuele Taralli (SRON–Netherlands Institute for Space Research)

Sven Visser (SRON–Netherlands Institute for Space Research)

Kevin Ravensberg (SRON–Netherlands Institute for Space Research)

Marcel Bruijn (SRON–Netherlands Institute for Space Research)

Davide Vaccaro (SRON–Netherlands Institute for Space Research)

Jan van der Kuur (SRON–Netherlands Institute for Space Research)

Jian Rong Gao (TU Delft - Applied Sciences, SRON–Netherlands Institute for Space Research)

Research Group

ImPhys/Adam group

X-ray TES Athena X-IFU Microcalorimeter NewAthena Ti/Au bilayer

DOI related publication

https://doi.org/10.1109/TASC.2026.3689289 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:d2857246-c754-4c0a-b574-e61792fd566e

More Info

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Publication Year

2026

Language

English

Research Group

ImPhys/Adam group

Journal title

IEEE Transactions on Applied Superconductivity

Issue number

6

Volume number

36

Article number

2103006

Downloads counter

11

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Abstract

We developed a wafer-scale 1504-pixel Ti/Au TES X-ray microcalorimeter array at SRON as a backup technology for the NewAthena X-IFU. The improved fabrication process yields of 99% wiring integrity and uniform absorber thickness within ~10%, corresponding to minimal performance variation. These results demonstrate a high level of process maturity and support the feasibility of Ti/Au TES arrays for future space-based X-ray spectrometers.

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