A CMOS compatible SiC accelerometer

Conference Paper (2003)
Author(s)

L Pakula (TU Delft - Electronic Instrumentation)

H Yang (TU Delft - Electronic Instrumentation)

Paddy French (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2003
Research Group
Electronic Instrumentation
Bibliographical Note
CD-rom@en
Pages (from-to)
761-764
ISBN (print)
0-7803-8133-5

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