A CMOS compatible SiC accelerometer
Conference Paper
(2003)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
Paddy French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:d42f624c-f05b-45df-8927-5a6aeab261c6
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Publication Year
2003
Research Group
Electronic Instrumentation
Bibliographical Note
CD-rom@en
Pages (from-to)
761-764
ISBN (print)
0-7803-8133-5
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