Prediction of back-end process-induced wafer warpage and experimental verification
Conference Paper
(2002)
Author(s)
RBR van Silfhout (External organisation)
WD van Driel (External organisation)
Y Li (TU Delft - (OLD) CITG Section Structural Mechanics (<2005))
GQ Zhang (External organisation)
L.J. Ernst (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
(OLD) CITG Section Structural Mechanics (<2005)
To reference this document use:
https://resolver.tudelft.nl/uuid:d509c325-e73f-4f39-a23c-68e07b43b8cf
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Publication Year
2002
Research Group
(OLD) CITG Section Structural Mechanics (<2005)
Pages (from-to)
1182-1187
ISBN (print)
0-7803-7430-4
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