Micro-fabrication as enabler for sub-¿m photonic alignment

Conference paper (2012)

Authors

M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
J.F.C. van Gurp Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
T.J. Peters Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
VA Henneken Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2012

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering