Micro-fabrication as enabler for sub-¿m photonic alignment
Conference Paper
(2012)
Author(s)
M Tichem (TU Delft - Micro and Nano Engineering)
JFC van Gurp (TU Delft - Micro and Nano Engineering)
T.J. Peters (TU Delft - Micro and Nano Engineering)
VA Henneken (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1109/ESTC.2012.6542172
To reference this document use:
https://resolver.tudelft.nl/uuid:d7a7126a-f1cd-4a1a-8733-d676da64de51
More Info
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Publication Year
2012
Language
English
Research Group
Micro and Nano Engineering
Pages (from-to)
1-6
ISBN (print)
978-1-4673-4645-0
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