Designing a suspended silicon nitride GHz acoustic beam splitter
M.C.C.Y. van der Vis (TU Delft - Mechanical Engineering)
Gerard Verbiest – Mentor (TU Delft - Dynamics of Micro and Nano Systems)
R. A. Norte – Mentor (TU Delft - Dynamics of Micro and Nano Systems)
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Abstract
Research has shown concepts of phononic integrated circuits (PnICs) consisting of multiple acoustic waveguides and beam splitters. Traveling acoustic waves experience energy loss when moving. Minimizing these losses is critical for large and complex PnICs. By fabricating on-chip PnICs, it is possible to operate under vacuum and at low temperatures resulting in lower acoustic losses.
Studies have shown on-chip data transport using straight acoustic waveguides fabricated inside suspended membrane phononic crystals. The use of high stress Silicon Nitride (SiN) has enabled
the manufacturing of high aspect ratio suspended structures. This is achieved by stress keeping the membrane under tension resulting in a flat surface.
Current acoustic beam splitter designs feature liquid and air for the wave supporting material. Making them not suitable for on-chip devices. Therefore, on-chip PnICs require a new type of splitter
design.
In this study, finite element methods are used to investigate if suspended SiN membranes offer a solution for on-chip acoustic beam splitting. The wave confinement of square and hexagonal lattice splitters are also compared to find the best performing design. Phononic bandstructures are constructed by performing eigenfrequency studies on various 2D phononic crystal unit cells. These bandstructures reach full GHz bandgaps with relative bandgap sizes of 57.3%.
Symmetric beam splitters are then made by introducing line defects into the crystal structures. Multiple wave excitation locations, frequencies and waveguide widths are investigated to establish the highest wave confining splitter design. The final design consists of a y-shaped splitter inside a suspended SiN hexagonal lattice phononic crystal and achieves a wave confinement of 85.03% at an excitation frequency of 3.25GHz.
The results show that suspended SiN membranes featuring hexagonal lattice phononic crystals offer a promising solution for on-chip beam splitting.